Probe Stations Trivia

Probe tables are important test equipment in the semiconductor industry and are widely used for precision electrical measurements on complex high-speed devices. Its purpose is to ensure the quality and reliability of the product, while reducing the development time and cost of the equipment manufacturing process. According to the production process, semiconductor test can be divided into three categories: verification test, wafer test and package test. The probe platform is mainly used for wafer testing, chip development and wafer manufacturing process failure analysis. In addition to the probe platform, it is also necessary to use the test instrument for wafer inspection, the test instrument is used for function and performance check. The probe platform can realize the connection between the chip under test and the tester. Through the combination of the probe platform and the tester, the function, electrical parameters and RF of the bare chip on the wafer can be tested, and qualified and unqualified chip products can be screened out at the same time.

1. What does the probe station consist of?

Sample Stage (Loading Stage)

A loading platform is a component device used to position wafers or chips. It is usually designed according to the size of the wafer and is equipped with the corresponding precision movement positioning function. The ultra-precision air-bearing motion platform developed independently by Kronos Technologies is used as assembly equipment for wafer or chip positioning. Its repeatable positioning accuracy can reach 50 nanometers, and with the help of precision machinery, it can be perfectly positioned within a very short exposure time,test probe thus accomplishing the task of extremely precise inspection of wafers at the measuring end.

2.Optical component

The function of this component is to use computer vision to zoom in to observe the object to be measured, so that the tip of the probe can be accurately positioned and aligned and placed on the measuring point of the wafer/chip to be measured.

3. Chuck

The metal surface is very flat, and the chuck can be used to hold objects in a fixture or to absorb wafers in a vacuum.

4. How does the probe table work?

Probe table can be used to fix the wafer or chip, and can accurately locate the object to be measured. Users of manual probe tables need to install the probe arm and probes in the manipulator, and then place the probe tips in the correct position on the object to be measured through the microscope. As long as the tips of all probes are in the correct position,micromanipulator testing of the object to be measured can begin.

The user can detach the probes from the wafer by lifting the plate and then move the table to the next chip for precise positioning using the microscope. After the pressure plate is lowered, the next chip can be tested. Semi- and fully-automated probe systems increase probe productivity through the use of mechanized workstations and machine vision automation.